Vacuum pump

Leybold A700 Q deposition system

Leybold A700 Q deposition system (ebeam)



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Leybold A700 deposition system:

Was used for deposition Titanium - Gold (ebeam)
Ebeam deposition unit (Leybold)
Vacuum pump Leybold D40-65B + Diffusion pump 2kW
Proceschamber:
Size: Width 680mm x Height 680mm x Depth 550mm
Substrateholder diameter 650mm
Incl. shielding
Oring door
Heaters
Basepressure low 10-6mbar
Electronics:
Baseline cabinet (eneeds upgrade)
Old PLC (for pump/vent)
Gas cabinet/water:
Various valves/flow reducers for gas and water


Note: D&M Vacuumsystems can upgrade the system to new processes (E-beam or Sputter) incl. new electronics and software.



EUR 37.500,-

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