Control cabinet, Yieldstar S-200B

ASML 4022.636.8559, MECA2

Electronics & Control Cabinet for ASML Yieldstar S-200B Optical Scatterometry Measurement System

YS METROLOGY ELEC CAB. ASSY2

Machine Type: Yieldstar S-200B
12NC: 9428.999.46070
Serial No.: 9745
Rated Voltage: 230/400V AC
System Configuration: 3ph+N+PE, TN-S / TT
Frequency: 50/60 Hz
Rated Power: 5 kVA
Full Load Current: 11 A/ph
Maximum Load Current: 7 A/ph
AIC/SCCR: 35 kA / 5 kA
OCP/ELB Rating: 25 A / 30 mA
12NC Diagrams: D000027425
Manufacture Date: 05-2011
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Module Overview:
Ethernet Switch 10/100/1000 Mbps / WAN / 4022.476.1102 – 3COM Baseline Switch 2824 3CBLUG24A
Ethernet Switch 10/100/1000 Mbps / LAN4 / 4022.476.1102 – 3COM Baseline Switch 2824 3CBLUG24A
Ethernet Switch 10/100/1000 Mbps / LAN1 / 4022.476.1102 – 3COM Baseline Switch 2824 3CBLUG24A
Metrology Number Cruncher Rack / MNCR / 4022.636.8000 – SUPERMICRO
Yieldstar Monitor Keyboard Drawer / YMKD / 4022.636.8200
Metrology Industrial PC2 II / PC2 / 4022.636.2768 – SUPERMICRO
Mains Safety Miscellaneous Rack – Metrology Electronics Cabinet Assy / MSMR-MECA / 4022.636.8561

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