Surface metrology system

FRT MicroProf MPR 1250

Fries Research & Technology
Device Designation: FRT MicroProf® MPR 1250
The FRT MicroProf® MPR 1250 is a high-precision surface metrology system from the MicroProf® series by Fries Research & Technology GmbH (FRT). These systems are designed for non-destructive and contactless analysis of surface parameters such as topography, roughness, layer thickness, and more.

Features of the FRT MicroProf:

Device Details:
Model: FRT MicroProf® MPR 1250
Item Number: 200 00
Sensor Type: CWL 300 µm
Serial Number: 0904001
Measurement Principle: Chromatic confocal point sensor
Light Source: Halogen lamp, white light
Vertical resolution: up to 3 nm
Measurement accuracy (Z): 100 nm
Lateral resolution (XY): 2.5 µm
Measurement angle to surface: 90° ±30°
Max. sample size: approx. 310 x 310 x 50 mm

Technical Data (Excerpt):
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XY-Stage:
Type: Compact XY-cross table
Travel (measurement range): 200 x 200 mm
Guidance: mechanical cross roller guide
Drive: DC motor with ball screw
Position feedback system: Heidenhain glass scale with reference mark
System resolution: 0.2 µm
Repeatability: < ±1 µm
Orthogonality XY: < 4 µm / 200 mm
Vertical runout (per axis): < 2 µm / 200 mm

Z-Axis (motorized):
Type: Linear axis
Travel: 50 mm (optional 100 mm)
Drive: Stepper motor with spindle drive
Lateral runout: < 2 µm / 50 mm

Manual Coarse Adjustment (optional):
Type: Dovetail guide
Adjustment range: up to 300 mm sample height

Measurement:
Minimum point spacing (XY): 0.6 µm
Sample size: approx. 310 x 310 x 50 mm
Max. sample weight: 5 kg (optional 10 kg)
Measuring speed: 1 µm/s up to max. 100 mm/s

System:
Total weight: approx. 275 kg (measurement setup: 225 kg)
Footprint (measurement setup): approx. 0.9 x 0.8 m
Dimensions control unit (W x D x H): approx. 0.55 x 0.53 x 0.32 m
Power supply (EU/US): 110–240 V, 50–60 Hz, 16 A
Power consumption: approx. 300–400 W

Operating Conditions:
Temperature range: 22 °C ±5 °C
Temperature stability: < 0.5 °C
Weight approx. 500 kg

Condition:
The device is in very good technical and cosmetic condition.
All axes move precisely and smoothly.

Scope of Delivery:
MicroProf® MPR200 00 XY measuring system
Control unit
Connection cables
(Subject to technical modifications and errors. All information without obligation!)
Inspection and onsite testing available by appointment.
For further questions, feel free to contact us by phone.

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