Interface module YieldStar S-200B

ASML 4022.636.68175, MSMR-TM

Advanced Semiconductor Materials Lithograph Holding N.V. Interface Module YieldStar S-200B, 4022 636 68175, MSMR TM

Model: 402263668175
Type: MSMRTM
Condition: Used

General Information:
Central electronic interface for the MSMR measuring system of an ASML Yieldstar S-200B

Rugged industrial enclosure in pull-out/rackmount design
Distribution of voltages (e.g., 24 V, 13 V)
Protection and safeguarding via multiple circuit breakers (F1…F5)
Connection to measuring and control components via X-ports
Interface to I/O, sensor systems, thermal control, and fan-filter units
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